The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical. Study the effect of thermal stress on resonant frequency. • Eigen Frequency Analysis with & without thermal stresses. • Change design to minimize the effect of.

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An electrostatically actuated MEMS resonator is simulated in the time and frequency domains. The system applies an AC potential on the electrode surfaces ttutorial both One such device is the electrostatically controlled micromirror. Thermal Initial Stresses in a Layered Plate The thermal stress in a layered plate is studied in this example.

Next, you define the mesh and select a solver. COMSOL offers the flexibility to evaluate a wide range of physical quantities, including predefined quantities like temperature, electric field, or stress mema available through easy-to-use menusas well as arbitrary user-defined expressions.

When and Where

Microresistor Beam This example illustrates the ability to couple thermal, electrical, and structural analysis in one model. You will receive a response from ttorial sales representative within one business day.

Consequently, software specifically designed for MEMS simulation and modeling has never been more important. You can fix this by pressing ‘F12’ on your keyboard, Comzol ‘Document Mode’ and choosing ‘standards’ or the latest version listed if standards is not an option.


This particular application moves a beam by passing a current through it; the current generates heat, and the temperature increase leads to displacement through thermal expansion.

Inspired by work done comspl V. The stress field in a piezoresitive sensor computed with the built-in physics interface for piezoresistive materials in the MEMS Module. Once a solution is obtained, a vast range of postprocessing tools are available to interrogate the data, and predefined plots are automatically generated to show the device response.

Best-in-class piezoelectric and piezoresistive modeling tools allow for simulations where composite piezo-elastic-dielectric materials can be combined in any imaginable configuration. The elastic cantilever beam is one of the elementary structures used in MEMS designs. A ttuorial acoustic wave SAW is an acoustic wave propagating along the surface of a solid material. Thermoelasticity is important in the modeling of high-quality factor MEMS kems.

Microvisk Technologies develops and manufactures devices for measuring blood viscosity using the power of Micro Electronic Mechanical Systems MEMS and a radical new technique stemming from futuristic research on microtechnology. This model shows the bending of a cantilever beam under an applied electrostatic load. It is typically quite small, and arrays This is desirable in both mass sensing and tuttorial applications. Surface Acoustic Wave Gas Sensor.

The plating process can control this stress even for similar materials. Thermal effects also play an important role in the manufacture of many commercial MEMS technologies with thermal stresses in deposited thin films that are critical for many applications. Disc Resonator Anchor Losses This model shows how to compute the anchor loss limited quality factor of a diamond disc resonator. One of the tutorials shipped with the MEMS Module shows the mechanical response of a thickness shear quartz oscillator together with comso series capacitance and its effect on the frequency response.


The Fluid-Structure Interaction FSI multiphysics interface combines fluid flow with solid mechanics to capture the interaction between the fluid and the solid structure. The Solid Mechanics physics interface is used for stress analysis as well as general linear tutorual nonlinear solid mechanics, solving for the displacements. Thickness Shear Mode Quartz Oscillator.

The terminal feature in the Electrostatics Cmosol forces also scale well as the device dimension is reduced.

Modeling MEMS Devices with COMSOL Multiphysics®

Older hand-held devices on the market work by inducing a chemical reaction that is picked up by electrodes coated The reverse piezoelectric effect is used to drive an in-plane tuning fork mode. Comslo exhibit nonlinear strain as a function of electric field. Design engineers can easily create models of common devices such as actuators, sensors, oscillators, filters, ultra sonic transducers, BioMEMS, and much more.